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overview

 

πlasma-R implements global (0d) modeling of plasma reactors. Based on the set of reactions occurring in the bulk plasma and on the reactor walls, as well as on the operating parameters of the plasma reactor (e.g. pressure, power, feed), it calculates the number densities of species in the bulk plasma. The mass balances for all species and an energy balance for the electrons are numerically solved.

 


 

Figure 1. Flow diagram of πlasma-R.

 

 

usage

 

The graphical user interface (GUI) makes πlasma-R a flexible tool: The user can define the sets for homogeneous and heterogeneous reactions in a text file. The user can also choose from a series of built-in functions for the calculation of the reaction rate constants. The execution of πlasma-R requires connection with the internet.

 

 

Figure 2. The editor used to define the reaction set.


 

 

download

 

In case you want to try the πlasma-R, please send us an email. We would be glad to send you a fully functional version of πlasma-R. The current version is 1.12a. It includes a short manual.
Download link: plasma-r-installer-1.12a.exe

Plasma-R can be registered via the menu Help -> Register.

 


 

contact

 

For further information on πlasma-R, as well as suggestions concerning applications, performance, and options of πlasma-R, please send us your comment.

 

 

applications

 

πlasma-R has been used in the following courses:
a) 2011 - : "Plasma Processes" in the Master's program for Microelectronics (http://cgi.di.uoa.gr/~vlsi/index.htm, in Greek). It is a joint Master's program of the University of Athens, with NCSR Demokritos, the Institute National Polytechnique De Grenoble, and the Institute of Communication and Computer Systems of The National Technical University of Athens.
b) 2013 - : "Fabrications and Characterization of Nanostructures" in the Master's program for Microsystems and Nanodevices (http://www.physics.ntua.gr/gr/micronano/index.htm in Greek). It is a joint Master's program of the National Technical University of Athens with NCSR Demokritos.
c) 2011 - 2012: "Process and Device Simulation" in the Master's program for Microelectronics.

 

 

references

 

1. G. Kokkoris, A. Goodyear, M. Cooke, and E. Gogolides,"A global model for C4F8 plasmas coupling gas phase and wall surface reaction kinetics", J. Phys. D: Appl. Phys. 41, 195211 (2008).

 

2. G. Kokkoris, A. Panagiotopoulos, A. Goodyear, M. J. Cooke, and E. Gogolides,"A global model for SF6 plasmas coupling reaction kinetics in the gas phase and on the surface of the reactor walls", J. Phys. D.: Appl. Phys. 42, 055209 (2009).

 

 

 

Web administrator: Kimon Kontosis

 

 

 

Last updated: April 3, 2014